Quartz glass single hole nozzle and quartz glass multi-hole burner head for feeding fluid

ABSTRACT

The present invention provides a quartz glass single hole nozzle for feeding fluid capable of performing high-precision control of a flow rate, a burner for heat processing equipped with the quartz glass single hole nozzle, a quartz glass multihole burner head for feeding fluid preferably used in flame processing or the like, and a quartz glass burner for heat processing equipped with the multihole burner. By using the nozzle, even if a distal end portion of the quartz glass burner, namely the nozzle is broken by contact with a workpiece or the like, it is enough to only replace the broken nozzle with a new one without a necessity for replacing the entire expensive quartz glass burner. When applying the nozzle to a metal burner, there can be given usefulness of the quartz glass such as heat resistance and contamination resistance or the like. The quartz glass single hole nozzle for feeding fluid according to the present invention comprises: a nozzle body portion made of a quartz glass material; and an attaching portion provided at the proximal end of the nozzle body portion, wherein a fluid feed path is bored in the interior of the nozzle body portion and the attaching portion of the nozzle body portion is detachably attachable to the distal end of a burner body for heat processing.

TECHNICAL FIELD

The present invention relates to a novel quartz glass single hole nozzlefor feeding fluid, in which a fluid feeding path is bored, and capableof feeding fluid such as gas, liquid, powder and the likequantitatively, a quartz glass burner for heat processing equipped withthe single hole nozzle, a quartz glass multihole burner head for feedingfluid, and a quartz glass burner for heat processing equipped with themultihole burner head.

BACKGROUND ART

Conventionally, in order to ensure durability against a high temperaturegenerated in company with combustion, or durability againstcontamination and degradation in company with a chemical reaction suchas a vapor phase reaction at a distal end and in a flow path, a burnermade of quartz glass as a material has been known especially as acombustion burner for heat processing. In order to form a flow path in aquartz glass burner, however, a skilled artisan had to manuallyfabricate the burner from a quartz glass tube as starting materialstaking a long time. Especially, a quartz glass burner with many flowpaths has been fabricated using many quartz glass tubes as startingmaterials by a skilled artisan in such a way that the quartz glass tubesare deliberately processed one by one and thereafter the quartz glasstubes are accurately bundled into a single body to thereby complete thequartz glass burner.

However, since such a quartz glass burner is manually fabricated, therehave inevitably arisen variations in dimensional precision betweenproduct lots and therefore a necessity has occurred for various settingsor adjustments for heat processing in each lot of the burners by a scentof an operator manipulating a burner.

Therefore, as disclosed in, for example, JP A 2000-104908, a method hasbeen proposed in which a burner head is mechanically and integrallymachined from a quartz glass rod according to a boring method using adrill.

The inventors have continuously investigated and developed uses of thefabrication method, and have repeated serious studies on applicationthereof to a single hole burner nozzle and a multihole burner of astraight type which were mainly fabricated from metals such as stainlesssteel, iron, brass or copper in the prior art. As a result, the presentinvention has been achieved.

That is, conventionally, a metal single hole burner especially used forlocal heat processing lacks problematically agile operability because itis heavy for an operator, and more than anything else, when heatprocessing is continued for long time, since a distal end of the metalburner is overheated by reflecting heat from a workpiece, a phenomenonunavoidably occurs that spray of the metal or metal ions from the distalend may be stuck or migrated to the workpiece.

Even in case of no heat processing, when liquids high in corrosivenessand reactivity, for example, strong acids such as hydrochloric acid orstrong bases such as caustic soda, or gases high in reactivity such assilicon tetrachloride are fed to the nozzle, an inconvenience inevitablyoccurs that the metal itself is corroded.

In view of the above, while a quartz glass single hole burner has beenemployed in a specified field, the burner is not of a type fabricated bydirectly drilling a high purity synthetic quartz glass rod with a boringdiameter precisely set in such a way as disclosed in the presentinvention; therefore, flow control thereof cannot be necessarilyperformed with a high precision, and it requires various kinds ofadjustment operations based on a scent of an operator manipulating theburner. Especially, in recent years, the heat processing utilizing arobot has been tried. In this case, if the heat processing is operatedplacing the burner at a fixed position and setting the other operatingconditions, there are severely demanded uniformity in performance andreproducibility of a product of the burner itself, with which a completemeasure for coping has been requested.

Moreover, when the distal end of the burner is broken by contact with aworkpiece, an expensive quartz glass burner has to be totally replacedwith a new one; measures to solve the problem have been awaited invarious aspects. In a micro-processing field, for example, when asyringe drug glass ampoule for medical use is heat sealed, since anozzle diameter is especially small, slight dimensional errors result ina difference in a feed rate of fluid; a quantitatively exactspecification has been required. A precise specification has beensimilarly required in an ordinary micro-welding field as well.

Since JP A 2000-104908 described above discloses such a construction asconvergence of a gas flow is indispensable, it has been also demanded tofabricate a multihole burner of non-convergence (in which feed paths areparallel to each other) which is employed, for example, in flameprocessing. However, since it has been difficult to fabricate themultihole burner maintaining an exact straight advance of drilling forboring, a problem has remained that fabrication of the multihole burnerinvolves difficulty.

The inventors have continuously investigated and developed uses of thefabrication method, and found it to apply the method to a single holeburner head and a multihole burner of straight type which were mainlyfabricated from metals such as stainless steel or copper in the priorart. As a result, the present invention has been achieved.

DISCLOSURE OF THE INVENTION

It is an object of the present invention to provide a quartz glasssingle hole nozzle for feeding fluid capable of performinghigh-precision control of a flow rate. By using the nozzle, even if adistal end portion of the quartz glass burner, namely the nozzle isbroken by contact with a workpiece or the like, it is enough to onlyreplace the broken nozzle with a new one without a necessity forreplacing the entire expensive quartz glass burner. When applying thenozzle to a metal burner, there can be given usefulness of the quartzglass such as heat resistance and contamination resistance or the like.It is another object of the present invention to provide a burner forheat processing equipped with the quartz glass single hole nozzle. It isstill another object to provide a quartz glass multihole burner head forfeeding fluid preferably used in flame processing or the like, and aquartz glass burner for heat processing equipped with the multiholeburner.

A quartz glass single hole nozzle for feeding fluid according to thepresent invention comprises: a nozzle body portion made of a quartzglass material; and an attaching portion provided at the proximal end ofthe nozzle body portion, wherein a fluid feed path is bored in theinterior of the nozzle body portion and the attaching portion of thenozzle body portion is detachably attachable to the distal end of aburner body for heat processing.

Furthermore, when the machined quartz glass has machining strain and thestrain needs removing, the strain of the entire nozzle may be removed byannealing. From the viewpoint of possible contamination of impurities,it is preferable to use synthetic quartz glass as the quartz glassmaterial. The end portion of the quartz glass single hole nozzle forfeeding fluid described above is detachably attachable to the distal endof the burner body for heat processing and hence when the nozzle aloneis broken or contaminated, it is advantageous to easily replace thebroken or contaminated nozzle with a new one. Note that if the attachingportion at the distal end of the single hole nozzle is provided with anexternal thread or an internal thread, the attaching and detachingoperation is easy.

A quartz glass burner for heat processing according to the presentinvention comprises: a burner body portion; a burner head portionprovided at the distal end of the burner body portion, wherein thequartz glass single hole nozzle for feeding fluid according to thepresent invention is attached to the burner head portion.

A metal or ceramic burner for heat processing according to the presentinvention comprises: a burner body portion; and a burner head portionprovided at the distal end of the burner body portion, wherein thequartz glass single hole nozzle for feeding fluid according to thepresent invention is attached to the burner head portion.

A quartz glass burner for heat processing according to the presentinvention comprises: a burner body portion; a burner head portionprovided at the distal end of the burner body portion; and a single holenozzle having a nozzle body portion in the interior of which a fluidfeed path is bored, wherein the single hole nozzle is integrally formedat the distal end of the burner head portion. In the above burner forheat processing, the burner head portion may be bent if necessary. Ahand burner according to the present invention is a quartz glass burnerfor heat processing, a metal or ceramic burner for heat processing, or aburner for heat processing according to the present invention, which anoperator can operate by hand. In the case where the entire burner bodyis made of quartz glass, it weighs about ⅕ of a stainless steel burner,and due to the light weight of the entire body precise operability issecured.

According to the hand burner of the present invention, in order toprevent a long stem portion from breakage, the burner body portion maybe covered with a film of silicon rubber or any of other syntheticresins with shrinkability and flexibility when necessary.

A quartz glass multihole burner head for feeding fluid according to thepresent invention is fabricated by boring a quartz glass material. Themultihole burner head is preferably constructed such that the fluidflows out in a state of non-convergence. To be concrete, the quartzglass multihole burner head for feeding fluid according to the presentinvention comprises: an outer cylinder; an inner cylinder provided inthe interior of the outer cylinder at a prescribed space therebetweenand having a fluid feed path in the interior thereof; a central cylinderprovided in the interior of the inner cylinder at a prescribed spacetherebetween and having a fluid feed path in the interior thereof; anozzle portion having many throughholes bored therein and integrallyprovided at the distal ends of the inner cylinder and the centralcylinder; and a tip portion having many fluid path outlets bored thereinand provided at the distal end of the outer cylinder located at aprescribed space in front of the distal end of the nozzle portion,wherein the fluid feed paths, the through holes and the fluid pathoutlets are parallel to each other, when discharging fluid a flow of thefluid is not converged, and the fluid flows out in a state ofnon-convergence.

A quartz glass burner for heat processing according to the presentinvention includes: a burner body portion; and a burner head portionprovided at the distal end of the burner body portion, wherein themultihole burner head according to the present invention is used as theburner head portion.

That is, in the single hole burner used especially for local heatprocessing, by precisely drilling the central portion of a circular endsurface of a quartz rod to bore a flow path having a prescribed diameterconcentrically, with the result that flow rate control of a fluid fedthrough the flow path can be correctly performed. Furthermore, byproviding an external thread or an internal thread at the end portion ofthe single hole nozzle according to the present invention, the singlehole nozzle can be easily attached to the distal end of a metal burner;therefore, there can be perfectly solved inconveniences associated witha conventional burner that metal impurities and others fly from thedistal end portion of the nozzle and then deposit onto a workpiece tocontaminate it especially in case of long time heat processing. Sincethe quartz glass single hole nozzle according to the present inventionis detachably attachable, even a burner made of a different materialsuch as metal or ceramic can easily enjoy a material advantage of thequartz glass single hole nozzle, namely high heat resistance andcontamination resistance.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a view showing a quartz glass single hole nozzle for feedingaccording to the present invention, wherein (a) is a descriptivesectional view and (b) a front view;

FIG. 2 is a descriptive exploded sectional view showing a quartz glasssingle hole nozzle for feeding fluid and a quartz glass burner body forheat processing to which the single hole nozzle is attached;

FIG. 3 is a descriptive sectional view showing a state where the quartzglass single hole nozzle for feeding fluid is attached to the quartzglass burner body for heat processing from the state of FIG. 2; and

FIG. 4 is a view showing a quartz glass multihole burner for feedingfluid according to the present invention, wherein (a) is a descriptivesectional view, (b) a front view, and(c) a rear view.

BEST MODE FOR CARRYING OUT THE INVENTION

While description will be given of embodiments of the present inventionbelow based on the accompanying drawings, it is needless to say thatvarious changes or modifications other than the embodiments shown in thefigures may be made without departing from the technical concept of thepresent invention.

FIG. 1 is a view showing a quartz glass single hole nozzle for feedingfluid according to the present invention. FIG. 2 is a descriptiveexploded sectional view showing a quartz glass single hole nozzle forfeeding fluid and a quartz glass burner body for heat processing (astate where a hand burner is completed) to which the single hole nozzleis attached. FIG. 3 is a descriptive sectional view showing a statewhere the quartz glass single hole nozzle for feeding fluid is attachedto the quartz glass burner body for heat processing (a hand burner isconstructed) from the state of FIG. 2. By completing the hand burner inthis way, the hand burner weighs in the range of from ¼ to ⅕ comparedwith the conventional stainless steel burner of the same shape. FIG. 4is a view showing a quartz glass multihole burner for feeding fluidaccording to the present invention.

In FIG. 1, reference numeral 10 designates a quartz glass single holenozzle for feeding fluid according to the present invention. The singlehole nozzle 10 includes: a nozzle body portion 10 a shaped so as to beslightly tapered toward the distal end thereof; and a step portion 10 bhaving a large diameter provided at the proximal end of the nozzle bodyportion 10 a. The step portion 10 b serves as an attaching portion.Needless to say, a shape of the nozzle body portion 10 a may becylindrical or of various shapes other than the embodiment shown in thefigure as occasion demands. Reference numeral 12 designates a fluid feedpath through which fluid such as gas (gas, liquid, powder or the like)is fed. The fluid feed path 12 is bored in the interior of the nozzlebody section 10 a, and the distal end thereof is a fluid dischargeoutlet 12 a. An internal thread portion 14 is formed in the interior ofthe step portion 10 b. While the step portion 10 b shown in the figurehas a diameter larger than the nozzle body portion 10 a, the stepportion 10 b may have the same diameter as the nozzle body portion 10 aor a smaller diameter than the nozzle body portion 10 a when occasiondemands. Such a size of the step portion 10 b may be designed accordingto a feeding mode at need.

While, in the figure, there is shown the embodiment where the internalthread portion 14 is formed, as described later the internal threadportion 14 is used to detachably screw the single hole nozzle 10 to thedistal end portion of the burner body; therefore, an external thread isformed on the outer surface of the step portion 10 b to provide anexternal thread portion.

In FIG. 2, reference numeral 20 designates a quartz glass burner forheat processing according to the present invention. The burner 20includes: a burner body portion 20 a; and a burner head portion 20 bprovided at the distal end of the burner body portion 20 a. Referencenumeral 22 designates a fluid feed path for feeding fluid such as gas.The fluid feed path 22 is bored in the interior of the burner 20. Notethat by bending the distal end portion of the burner head portion 20 b,operational convenience is improved.

Reference numeral 25 designates a receiving portion protrusivelyprovided at the distal end of the burner head portion 20 b. An externalthread portion 25 a is formed on the outer surface of the receivingportion 25. Reference numerals 26 a, 26 b are fluid introduction pipesconnected to the proximal end of the burner body portion 20 a. The fluidintroduction pipes 26 a, 26 b serves so as to introduce fluid such asgas from fluid inlets 27 a, 27 b at the proximal ends thereof into thefluid feed path 22. Note that a type of the burner 20 may be a handburner type and there is imposed no specific limitation thereon.

As shown in FIG. 3, by screwing the internal thread portion 14 of thesingle hole nozzle 10 to the external thread portion 25 a of thereceiving portion 25, the single hole nozzle 10 is attached to thedistal end of the burner head section 20 b. Since the single hole nozzle10 is detachably screwed to the receiving portion 25, if the single holenozzle 10 is broken or the like troubles happen, the single hole nozzle10 may be easily detached and replaced with a new one. Therefore, pooreconomy can be avoided that an entire expensive burner is replaced witha new one when a nozzle portion alone is broken, which was aconventional practice. Note that, as described above, when the internalthread portion 14 of the single hole nozzle 10 is changed to an externalthread portion, it is a matter of course that the external threadportion 25 a of the receiving portion 25 is to be changed to an internalthread portion in correspondence to the change in the single hole nozzle10.

It is one of the features of the present invention that the respectivefluid feed paths 12, 22 of the single hole nozzle 10 and the burner 20according to the present invention are bored. Especially, a high puritysynthetic quartz glass rod is used as a quartz glass material, adiameter to be machined is directly set with precision, and the fluidfeed paths 12, 22 are concentrically bored by drilling, thereby toenable correct control of a flow rate of fluid flowing through the fluidfeed paths 12, 22.

Furthermore, in FIGS. 2 and 3, while there are shown the embodimentswhere the quartz glass single hole nozzle 10 according to the presentinvention is attached to the distal end of the quartz glass burner 20, aburner made of a material other than the quartz glass such as a metalburner may be replaced therewith. That is, there may be employed such aconstruction that the quartz glass single hole nozzle 10 according tothe present invention is detachably attached to a distal end receivingportion of a metal burner (not shown) having a shape similar to thequartz glass burner 20 shown in FIGS. 2 and 3. By use of a quartz glasssingle hole nozzle of the present invention, there can be perfectlysolved inconveniences that metal impurities and others fly from thedistal end portion of the nozzle and then deposit onto a workpiece tocontaminate it, especially in case of long time heat processing with aconventional metal burner. That is, since a quartz glass single holenozzle 10 according to the present invention is detachably attachable,even a burner made of a material other than quartz glass such as metalcan enjoy a material advantage of the quartz glass single hole nozzle,that is heat resistance and contamination resistance.

In the above description, there is shown the embodiment where the quartzsingle hole nozzle 10 is fabricated separately and detachably attachedto the burner 20. There may be also employed such a construction that anozzle portion having a structure similar to the quartz glass singlehole nozzle 10 described above is integrally formed at the distal endportion of the quartz glass burner for heat processing 20 by preciselyboring with drilling. In this case as well, there is enjoyed anadvantage that a flow rate of fluid flowing through the flow path can beprecisely controlled in advance.

Next, description will be given of a quartz glass multihole burner headfor feeding fluid according to the present invention based on FIG. 4. InFIG. 4, reference numeral 30 designates a quartz glass multihole burnerhead for feeding fluid according to the present invention. The burnerhead 30 includes: an outer cylinder 32; an inner cylinder 34 provided inthe interior of the outer cylinder 32 at a prescribed spacetherebetween; and a central cylinder 36 provided in the interior of theinner cylinder 34 at a prescribed space therebetween. A fluidintroduction tube 34 b at the proximal end of which an inlet 34 a forfluid such as gas or the like is provided is attached to the proximalend of the inner cylinder, and fluid can be introduced from the fluidinlet 34 a into the fluid feed path 35 in the interior of the innercylinder 34. The proximal end portion of the central cylinder 36 extendsoutwardly and the proximal end becomes a fluid inlet 36 a. With theconstruction, fluid can be introduced from the fluid inlet 36 a into afluid feed path 37 in the interior of the central cylinder 36.

A nozzle portion 40 having many throughholes 38 bored therein isintegrally provided at the distal ends of the inner cylinder 34 and thecentral cylinder 36. Furthermore, a tip portion 44 having many fluidpath outlets 42 bored therein is provided at the distal end of the outercylinder 32 located at a prescribed space in front of the distal end ofthe nozzle portion 40.

A feature of the quartz glass multihole burner head for feeding fluid 30according to the present invention resides in that the fluid feed paths35,37, the throughholes 38 and the fluid path outlets 42 are bored inparallel to each other; when discharging fluid such gas, a flow of thefluid is not converged and the fluid flows out in a state ofnon-convergence. While such a burner of so-called straight type isrequired in flame processing or the like, the burner of this type hasbeen hardly fabricated because it is difficult to secure an exactstraight advance of drilling for boring according to the conventionaltechnology. The inventors have developed a precision drilling tool andmade precision drilling possible with the drilling tool; fabrication ofthe above multihole burner head 30 has been made possible. By detachablyattaching the multihole burner head 30 to the distal end receivingportion of the quartz glass burner 20, a metal burner or a ceramicburner, such an assembled burner can be used as a heat processing burnerequipped with the multihole burner head 30.

EXAMPLES

More concrete description will be given of the present invention showingexamples. First of all, there are shown Example 1 in which a single holenozzle according to the present invention was used and ComparativeExample 1 in which a conventional metal (brass) nozzle was used.

Example 1 and Comparative Example 1

With a workpiece of a fused natural quartz rod of 15 mm in diameter,there were used a single hole nozzle made of synthetic quartz glassaccording to the present invention and a conventional brass single holenozzle under the conditions shown in Table 1. TABLE 1 Distance betweennozzle distal Fluid flow end and rate workplace Results Example 1Synthetic Oxygen

20 mm No deposition quartz glass 20 L/min was formed on single holeHydrogen workpiece surface nozzle 50 L/min (3 mm φ) Comparative Brasssingle Oxygen

20 mm After about 10 Example 1 hole nozzle 20 L/min min (spotty) (3 mmφ) Hydrogen metal deposition 50 L/min was formed on workpiece surface

Example 2

A rectangular quartz glass cap was attached to the distal end of asingle hole nozzle made of a synthetic quartz glass according to thepresent invention to generate a flame (torch) of a combustion reactionbetween oxygen and hydrogen from a single slit and the single slit waslocated at prescribed position (X, Y, Z) to take data of an ignitiontest. A flow rate (F) of oxygen-hydrogen mixed gas, a sectional size ofthe single slit (S), a distance from the slit to a thermocouple formeasurement (D) was varied, and by measuring a temperature (T° C.),temperature distribution and flame stability were investigated. Theinvestigation showed good results that variations of temperaturedistribution in a flame of a nozzle according to the present inventionwere small. Note that a ratio between flow rates of oxygen and hydrogenwas set to 2:5. TABLE 2 Single slit (S) 1 mm × D F (cc) 3 mm × 20 mm 11mm 1 mm 1.4 mm 1.8 mm [1] (X, Y, Z) = (0 mm, 2 mm and 0 mm) 200 996° C.971° C. 962° C. 939° C. 914° C. 250 1010° C.  990° C. 996° C. 975° C.964° C. 300 1029° C.  1004° C.  1022° C.  1005° C.  989° C. [2] (X, Y,Z) = (0 mm, 3 mm and 0 mm) 200 936° C. 941° C. 919° C. 912° C. 890° C.250 984° C. 995° C. 980° C. 971° C. 847° C. 300 1024° C.  1038° C. 1018° C.  1017° C.  1004° C.  [3] (X, Y, Z) = (0 mm, 4 mm and 0 mm) 200863° C. 879° C. 810° C. 811° C. 783° C. 250 904° C. 936° C. 880° C. 870°C. 878° C. 300 960° C. 1009° C.  945° C. 933° C. 947° C.Capability of Exploitation in Industry:

As described above, when a quartz glass single hole nozzle for feedingfluid according to the present invention is applied to a quartz glassheat processing burner, flow rate control can be realized with highprecision, and even when the distal end portion (nozzle) is broken bycontact with a workpiece or the like, it is enough to only replace thebroken nozzle with a new one without a necessity for replacing theentire expensive quartz glass burner, and when the quartz glass singlehole nozzle for feeding fluid is applied to a metal burner, the metalburner can enjoy a material advantage of the quartz glass nozzle forfeeding fluid, that is high heat resistance and contaminationresistance. With the quartz glass multihole burner head for feedingfluid according to the present invention, fluid can flow out in a stateof non-convergence; therefore, a burner used for heat processing inwhich combustion gas of non-convergence is fed is preferably used forflame processing or the like.

In addition, as fluid to be fed in the quartz glass single hole nozzleaccording to the present invention, any gas for a combustion reactionmay be employed as far as uses for heat processing, and there areexemplified various kinds of liquid, mixed gases, powder, vapormaterials and others in preparation of new compounds and mixtures. Ifthe entire burner body is made of quartz glass, highly corrosive liquidor gas can be fed at ease. Especially, the quartz glass single holenozzle according to the present invention may be used for a super highpurity synthetic reaction and other chemical reactions withoutcontamination of unnecessary impurities into a product or a substance tobe treated. If the entire body of the burner is made of quartz glass, itweighs about ⅕ of a stainless steel burner and due to the light weightthereof, a precise operability is ensured.

1. A quartz glass single hole nozzle for feeding fluid comprising: anozzle body portion made of a quartz glass material; and an attachingportion provided at the proximal end of the nozzle body portion, whereina fluid feed path is bored in the interior of the nozzle body portionand the attaching portion of the nozzle body portion is detachablyattachable to the distal end of a burner body for heat processing. 2.The quartz glass single hole nozzle for feeding fluid according to claim1, wherein the quartz glass material is a synthetic quartz glassmaterial.
 3. The quartz glass single hole nozzle for feeding fluidaccording to claim 1, wherein the attaching portion is provided with anexternal thread or an internal thread and the attaching portion of thenozzle body portion is detachably attachable to the distal end of theburner body for heat processing.
 4. A quartz glass burner for heatprocessing comprising: a burner body portion; a burner head portionprovided at the distal end of the burner body portion, wherein thequartz glass single hole nozzle for feeding fluid according to claim 1is attached to the burner head portion.
 5. A metal or ceramic burner forheat processing comprising: a burner body portion; and a burner headportion provided at the distal end of the burner body portion, whereinthe quartz glass single hole nozzle for feeding fluid according to claim1 is attached to the burner head portion.
 6. A quartz glass burner forheat processing comprising: a burner body portion; a burner head portionprovided at the distal end of the burner body portion; and a single holenozzle having a nozzle body portion in the interior of which a fluidfeed path is bored, wherein the single hole nozzle is integrally formedat the distal end of the burner head portion.
 7. The quartz glass burnerfor heat processing according to claim 4, wherein the burner headportion is bent.
 8. The metal or ceramic burner for heat processingaccording to claim 5, wherein the burner head portion is bent.
 9. Thequartz glass burner for heat processing according to claim 6, whereinthe burner head portion is bent.
 10. A hand burner made of the burnerfor heat processing according to claim 4, which an operator can operateby hand.
 11. A hand burner made of the burner for heat processingaccording to claim 5, which an operator can operate by hand.
 12. A handburner made of the burner for heat processing according to claim 6,which an operator can operate by hand.
 13. A quartz glass multiholeburner head for feeding fluid fabricated by boring a quartz glassmaterial.
 14. The quartz glass multihole burner head for feeding fluidaccording to claim 13, wherein the fluid flows out in a state ofnon-convergence.
 15. The quartz glass multihole burner head for feedingfluid according to claim 13 comprising: an outer cylinder; an innercylinder provided in the interior of the outer cylinder at a prescribedspace therebetween and having a fluid feed path in the interior thereof;a central cylinder provided in the interior of the inner cylinder at aprescribed space therebetween and having a fluid feed path in theinterior thereof; a nozzle portion having many throughholes boredtherein and integrally provided at the distal ends of the inner cylinderand the central cylinder; and a tip portion having many fluid pathoutlets bored therein and provided at the distal end of the outercylinder located at a prescribed space in front of the distal end of thenozzle portion, wherein the fluid feed paths, the through holes and thefluid path outlets are parallel to each other, when discharging fluid aflow of the fluid is not converged, and the fluid flows out in a stateof non-convergence.
 16. The quartz glass multihole burner head forfeeding fluid according to claim 14 comprising: an outer cylinder; aninner cylinder provided in the interior of the outer cylinder at aprescribed space therebetween and having a fluid feed path in theinterior thereof; a central cylinder provided in the interior of theinner cylinder at a prescribed space therebetween and having a fluidfeed path in the interior thereof; a nozzle portion having manythroughholes bored therein and integrally provided at the distal ends ofthe inner cylinder and the central cylinder; and a tip portion havingmany fluid path outlets bored therein and provided at the distal end ofthe outer cylinder located at a prescribed space in front of the distalend of the nozzle portion, wherein the fluid feed paths, the throughholes and the fluid path outlets are parallel to each other, whendischarging fluid a flow of the fluid is not converged, and the fluidflows out in a state of non-convergence.
 17. A burner for heatprocessing comprising: a burner body portion; a burner head portionprovided at the distal end of the burner body portion, wherein themultihole burner head according to claim 13 is used as the burner headportion.
 18. A burner for heat processing comprising: a burner bodyportion; a burner head portion provided at the distal end of the burnerbody portion, wherein the multihole burner head according to claim 14 isused as the burner head portion.
 19. A burner for heat processingcomprising: a burner body portion; a burner head portion provided at thedistal end of the burner body portion, wherein the multihole burner headaccording to claim 15 is used as the burner head portion.
 20. A burnerfor heat processing comprising: a burner body portion; a burner headportion provided at the distal end of the burner body portion, whereinthe multihole burner head according to claim 16 is used as the burnerhead portion.